JPH0315962B2 - - Google Patents
Info
- Publication number
- JPH0315962B2 JPH0315962B2 JP23136283A JP23136283A JPH0315962B2 JP H0315962 B2 JPH0315962 B2 JP H0315962B2 JP 23136283 A JP23136283 A JP 23136283A JP 23136283 A JP23136283 A JP 23136283A JP H0315962 B2 JPH0315962 B2 JP H0315962B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- magnetic disk
- photoelectric conversion
- defects
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 claims description 106
- 238000006243 chemical reaction Methods 0.000 claims description 51
- 238000009826 distribution Methods 0.000 claims description 33
- 238000005286 illumination Methods 0.000 claims description 29
- 230000003287 optical effect Effects 0.000 claims description 25
- 238000007689 inspection Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 16
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 claims description 2
- 238000000576 coating method Methods 0.000 description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 15
- 229910052782 aluminium Inorganic materials 0.000 description 15
- 239000011248 coating agent Substances 0.000 description 15
- 230000000694 effects Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 8
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9506—Optical discs
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23136283A JPS60123708A (ja) | 1983-12-09 | 1983-12-09 | 磁気デイスクの表面欠陥検査方法および装置 |
| US06/679,358 US4674875A (en) | 1983-12-09 | 1984-12-07 | Method and apparatus for inspecting surface defects on the magnetic disk file memories |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23136283A JPS60123708A (ja) | 1983-12-09 | 1983-12-09 | 磁気デイスクの表面欠陥検査方法および装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60123708A JPS60123708A (ja) | 1985-07-02 |
| JPH0315962B2 true JPH0315962B2 (en]) | 1991-03-04 |
Family
ID=16922428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23136283A Granted JPS60123708A (ja) | 1983-12-09 | 1983-12-09 | 磁気デイスクの表面欠陥検査方法および装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60123708A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0614014B2 (ja) * | 1986-05-15 | 1994-02-23 | 日立電子エンジニアリング株式会社 | 磁気ディスク用のサブストレート面板の表面欠陥検出装置 |
| JPS62267650A (ja) * | 1986-05-15 | 1987-11-20 | Hitachi Electronics Eng Co Ltd | 面板欠陥検出方法およびその検出器 |
-
1983
- 1983-12-09 JP JP23136283A patent/JPS60123708A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60123708A (ja) | 1985-07-02 |
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